Lithography Process Control by Harry J. Levinson
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Description
This Tutorial Text covers lithography process control at several levels, from fundamental through advanced topics. A basic familiarity with lithography science is assumed. The book is intended to be a self-contained tutorial that works both as an introduction for those entering the field and as a reference for the experienced lithography engineer. Subtle problems in a control process often are related to basics. For this reason, the text reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. This book evolved out of the author's work with lithography engineers addressing quality problems in the highly competitive IC industry.
