Micromachined Ultrasound-Based Proximity Sensors Mark R. Hornung Author
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Description

Micromachined Ultrasound-Based Proximity Sensors presents a packaged u ltrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the charac terization, optimization and the long-term stability of silicon membra ne resonators as well as appropriate packaging for ultrasound microsys tems.

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